The closest I can remember it the Buffy episode I Robot, You Jane. A demon in the internet has a robotic body built for him to possess.
There was also EVENT HORIZON in which a spaceship is possessed or something like that. (I actually edited the novelization, but that was a LONG time ago and my memories are fuzzy.)
 
				 
 
		 
 
		 
 
		 
 
		
 
 
		 
 
		 
 
		 
 
		
 
 
		 
 
		 
 
		