I question the premise too, but I'll play along in terms of subsequent influence I'd have to choose:
Wells- Didn't invent the genre, but he is the father of it.
Star Wars- enormous popularity and influence on subsequent films. Paved way for Trek re-launch as well.
Day The Earth Stood Still- Not on the list, but the 50's were a sci-fi decade and this movie helped set the template.
I'll decide later which of the list I want to vote on for my third.