I didn't see it myself because I hate the show, but my parents said the finale of "Everybody Loves Raymond" was pretty low-key. I imagine that may have been as a result of the negative reaction to Seinfeld's big extravaganza of a finale where they brought back tons of previous guest stars for a huge spectacle and the public wasn't that thrilled.
I think "The X-Files" made the same mistake with its trial featuring a parade of recurring characters. While "Everybody Loves Raymond" was a show I didn't much care for, if it starts a trend of more subtle and thoughtful series finales, I'll be grateful to it for that.
I would have considered "Futurama" season 5 finale "The Devil's Hands Are Idle Playthings" a good example of a perfect, touching series finale that didn't try so hard to be epic if the show hadn't returned from it later. I don't know if it was intended that way (after all, the show was cancelled), but the end of "Firefly" was pretty touching and subtle.